柔性封装机器人
柔性封装机器人是专用的自动封装设备，主要针对MEMS（Micro Electro Mechanical systems的缩写，即微电子机械系统）应用于小批量、多品种传感器的自动封装而研制开发，可针对各传感器特点，通过夹具的柔性设计完成不同类型传感器的封装。
Flexible Encapsulation Robot is an exclusive Automatic Encapsulation Equipment. It aims at MEMS( Micro Electro Mechanical Systems) and is developed and applied to the Auto-Encapsulation of small lot and various kinds of sensors. It encapsulates various kinds of sensors with the flexible design of fixtures according the characeristic of sensors
1、应用领域：MEMS产业发展特点是小批量、多品种，柔性封装机器人适应多种MEMS传感器的封装。Application area: Small lot and various categories is the characteristic of MEMS industry. The Flexible Encapsulation Robot is adopted to kinds of MEMS sensor encapsulation.
2、关键技术 Key Technology
1)自动定位：采用自动变倍显微镜实现大范围、高精度位置测量。解决了变倍自动调焦、显微图像分割等关键问题，可实现柔性封装前的自动定位；Auto-positioning: apply the auto-zooming microscope to realize the large-scale and high accurate position measurement. Figure out the key question of zooming auto-facusing and micro image segmentation. Realize the auto-positioning before the encapsulation.
2)定位精度高：采用精密步进电机驱动，可实现定位精度5μm；High accuracy of positioning: driven by the accurate stepper motor ; 5μm high accurate positioning.
3)温度控制范围宽、控制着精度高：接合工艺炉采用基于PID调节技术的温度控制方式，可实现0-500度范围内的温度调整和控制。Wide scale of temperature control and high accuracy control: the combiner applys the PID-based adjusting technology, tuning and controling the temperature within 0~500°C.
4)人机界面友好：基于计算机控制方式，实现全部节拍的安排、动作的设置和信息的采集，提供良好的人机界面。Friendly Human-computer interface: Base on the computer control; carry out the all beats scheduling, motion setup and information collocting; provide friendly human computer interface.
3、功能：将精密定位、显微视觉、作业工具等关键技术有机结合，通过模块化设计，可根据需求有效集成，满足不同封装要求。Function: combining organically the key technology of accurate positioning, mircro visual and operating tools, adopting the modular design, different encapsolation requires are satisfied according effetive intergration.
4、实际应用 Practical Application
（1）、已实现MEMS高温压力传感器自动化组装作业。MEMS high-temperature pressure sensor auto-encapsulation has been realized
（2）、实现加速度计、微麦克风等传感器的引线键合封装。Accelerometer and tiny microphone sensors’ lead bonding encapsulation has been realized
5、样机照片 Product sample
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